No, there isn't really a way to clean the maf sensor because it is so delicate and fragile..... any chemical would ruin it and then you'd have to spend over $600 to get a new one aand have it installed...
You can use a non-residual electronics contact cleaner (you can find it a Radio Shack and the like). It will NOT ruin the sensor; the Z guys have been doing it with no adverse results and one of our members here has done it as well.
Question is: why do you think you need to clean it?
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